SYMPOSIUM O - Thin Film Materials for Large Area
Electronics
Large Area
Electronics is a major market, involving Displays, Imagers, X-ray
detectors and large area sensors. It provides a strong demand for
high performance, low cost, thin film materials. These include
polycrystalline silicon, amorphous silicon, amorphous gate
insulators, novel forms of carbon, light emitting materials and
photoconductive materials. The future device developments are
limited by the materials performance. This symposium brings
together recent advances in areas such as :
- Thin Film
Transistors (TFTs)
- Crystallisation
methods for polycrystalline silicon
- Amorphous
silicon and gate insulator materials for TFTs
- Photoconductive
materials
- Light
emitting materials
- Materials
for Field Emission displays
- Plasma
processing
- Materials
Characterisation
The list of
invited speakers includes :
- S. Uchikoga
(Toshiba, Japan)- Polysilicon TFTs
- J. Boyce
(Xerox PARC, USA) *
- J. Jang
(Korea) - Metal induced crystallisation of amorphous
silicon
- M. Kondo
(ETL, Japan) - Plasma deposition of microcrystalline
silicon
- M. Hoheisel
(Siemens AG, Germany)- Amorphous semiconductor based
X-ray detectors
- D. Pribat
(Thomson-CSF, France) - Adressing of organic
electroluminescent displays
- R. Wehrspohn
(Philips, UK) - Stability of a-Si:H TFTs
- J.H. Werner
(Stuttgart Univ., Germany) From polycrystalline to
crystalline silicon on glass
- L. Mariucci
(IESS-CNRS, Italy) Advanced excimer laser
crystallisation techniques
- R. Brenot
(Ecole Polytechnique, France) Silicon growth
studied by in-situ TRMC
- A. Flewitt
(Cambridge University , UK)- Low temperature growth of
silicon nitrides
- M. Kessels
(TU Eindhoven, NL) - Growth processes of amorphous
silicon
* to be confirmed
Scientific
Committee : Dr. E. Fogarassy (Strasbourg, F); Prof. G.
Leising (Graz , A), Prof. R. Martins (Lisbon, P), Prof.
J.R.Morante (Barcelona, S); Dr. D. Pribat (Thomson-CSF, F); Prof.
I. Shimizu (Tokyo, J); Prof. S. Veprek (Muenchen, D)
Symposium
organizers:
- Bernard
EQUER
- Lab.
PICM
- Ecole
Polytechnique
- F-91128
Palaiseau, France
- Phone
(33) 1 69 33 40 09
- Fax
(33) 1 69 33 30 06
- e-mail
: bernard.equer@polytechnique.fr
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- Roland
BUERKLE
- Schott
Displayglas GmbH
- P.O.Box
2480
- D-55014
Mainz, Germany
- Phone
(49) 6131 66 8038
- Fax:
(49) 6131 66 8182
- e-mail:
buerkle@schott.de
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- John
ROBERTSON
- Engineering
Dept.
- Cambridge
University
- CAMBRIDGE
CB2 1PZ
- UK
- Phone
(44) 1223 332689
- Fax
(44) 1223 332662
- e-mail
: jr@eng.cam.ac.uk
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- Pere
ROCA i CABARROCAS
- Lab.
PICM
- Ecole
Polytechnique
- F
91128 Palaiseau, France
- Phone
(33) 1 69 33 32 07
- Fax
(33) 1 69 33 30 06
- e-mail
: roca@poly.polytechnique.fr
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- Guglielmo
FORTUNATO
- IESS-CNR,
- Via
Cineto Romano 42
- 00156
- Roma (ITALY)
- Phone
(39) 06 41522228
- Fax
(39) 06 41522220
- e-mail
: guglielmo@iess.rm.cnr.it
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