PISE (Plasma Ion Surface Engineering)
New Plasma Reactors and Ion Sources, Modelling and
New Diagnostics Techniques
Laser and Emission Spectroscopy in and - dc Discharges
J. AMORIM, G. BARAVIAN, S.
BOCKEL, A. RICARD and G. SULTAN
Laser Induced Fluorescence Observation of the Ion Velocity
Distribution Function Modifications Induced by Electrostatic Ion
Shock Waves.
G. BACHET, L. CHÉRIGIER, C. ARNAS-CAPEAU,
F. DOVEIL and R.A. STERN
Ground State and Excited State H-Atom Temperatures in a
Microwave Plasma Diamond Deposition Reactor.
A. GICQUEL, M. CHENEVIER, Y. BRETON, M. PETIAU,
J.P. BOOTH and K. HASSOUNI
Interest of Pulsed and Modulated dc Discharges for Depositing
Insulating Compounds by Reactive Magnetron Sputtering.
A. BILLARD and C. FRANTZ
Time Resolved Diagnostics for Kinetic Studies in Pulsed rf Discharges
S. De BENEDICTIS
and G. DILECCE
Determination of N and O Atom Density in
Ar - and
Flowing Microwave Post Discharges
T. CZERWIEC, J.
GAVILLET, T. BELMONTE, H. MICHEL and
A. RICARD
Examination of Thin Film Uniformity at the Bottom of a Hole
Structure Using a 3D Sputter Simulation Package.
S. DANIELS and
D.C. CAMERON
PIC/MC Modeling of an Ion Source: Case Study
Ralf KRIMKE and Herbert M. URBASSEK
Modeling Species and Energy Transport in Moderate Pressure
Diamond Deposition Plasmas
K. HASSOUNI, S. FARHAT, C.D.
SCOTT and A. GICQUEL
Regular Papers
Materials Science
Description of an Electrostatic Force Nanoindenter.
(Text in French).
J.-C. DARGENTON and J. WOIRGARD
Glide Dislocations Dissociation in Inversion Domain Boundaries
of Plastically Deformed Aluminium Nitride
Virginia FEREGOTTO and Jean-Pierre
MICHEL
Plasma Physics -- Surface Interactions
Analytical calculations of laser absorption
spectra on a metallic atomic vapor produced by electron beam.
Application to atomic velocity measurement.
(Text in French).
C. GONELLA and S. CHATAIN