JOURNAL DE PHYSIQUE III, Vol.6, September 1996

CONTENTS

PISE (Plasma Ion Surface Engineering)
New Plasma Reactors and Ion Sources, Modelling and New Diagnostics Techniques

Laser and Emission Spectroscopy in and - dc Discharges
J. AMORIM, G. BARAVIAN, S. BOCKEL, A. RICARD and G. SULTAN

Laser Induced Fluorescence Observation of the Ion Velocity Distribution Function Modifications Induced by Electrostatic Ion Shock Waves.
G. BACHET, L. CHÉRIGIER, C. ARNAS-CAPEAU, F. DOVEIL and R.A. STERN

Ground State and Excited State H-Atom Temperatures in a Microwave Plasma Diamond Deposition Reactor.
A. GICQUEL, M. CHENEVIER, Y. BRETON, M. PETIAU, J.P. BOOTH and K. HASSOUNI

Interest of Pulsed and Modulated dc Discharges for Depositing Insulating Compounds by Reactive Magnetron Sputtering.
A. BILLARD and C. FRANTZ

Time Resolved Diagnostics for Kinetic Studies in Pulsed rf Discharges
S. De BENEDICTIS and G. DILECCE

Determination of N and O Atom Density in Ar - and Flowing Microwave Post Discharges
T. CZERWIEC, J. GAVILLET, T. BELMONTE, H. MICHEL and A. RICARD

Examination of Thin Film Uniformity at the Bottom of a Hole Structure Using a 3D Sputter Simulation Package.
S. DANIELS and D.C. CAMERON

PIC/MC Modeling of an Ion Source: Case Study
Ralf KRIMKE and Herbert M. URBASSEK

Modeling Species and Energy Transport in Moderate Pressure Diamond Deposition Plasmas
K. HASSOUNI, S. FARHAT, C.D. SCOTT and A. GICQUEL

Regular Papers

Materials Science

Description of an Electrostatic Force Nanoindenter. (Text in French).
J.-C. DARGENTON and J. WOIRGARD

Glide Dislocations Dissociation in Inversion Domain Boundaries of Plastically Deformed Aluminium Nitride
Virginia FEREGOTTO and Jean-Pierre MICHEL

Plasma Physics -- Surface Interactions

Analytical calculations of laser absorption spectra on a metallic atomic vapor produced by electron beam. Application to atomic velocity measurement. (Text in French).
C. GONELLA and S. CHATAIN



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