Low Activity Alpha Particle Detection

Alpha particles from IC materials are known to cause SEU in semiconductor devices. Since 1978, the semiconductor industry has had to find accurate techniques for measuring these naturally occurring trace amounts of alpha emitting contaminants. This talk discusses some common metrology methods, with emphasis on gas flow proportional counters.

Michael Tucker

Before starting Alpha Sciences, Michael Tucker served as Vice President for 8 years at Spectrum Sciences in Santa Clara, CA. He has 16 years experience in the semiconductor industry, including ion implantation and clean room automation.